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Publication details

Document type
Conference papers

Document subtype
Full paper

Title
Gas Immersion Laser Doping of silicon wafers: Large area n++ phosphorus doping on p++ emitters by laser spot rastering

Participants in the publication
Guilherme Gaspar (Author)
IDL
Afonso F. Guerra (Author)
Filipe C. Serra (Author)
IDL
Ana S. Viana (Author)
CQE
Arumaghan Jayaprasad (Author)
Ivo Costa (Author)
IDL
David M. Pêra (Author)
IDL
José A. Silva (Author)
IDL
Lasse Vines (Author)
UNIVERSITY OF OSLO
João M. Serra (Author)
IDL
Killian Lobato (Author)
Dep. Engenharia Geográfica, Geofísica e Energia
IDL

Date of Publication
2021-06-03

Event
2021 Spring Meeting of the European Materials Research Society (E-MRS)

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APA
Guilherme Gaspar, Afonso F. Guerra, Filipe C. Serra, Ana S. Viana, Arumaghan Jayaprasad, Ivo Costa, David M. Pêra, José A. Silva, Lasse Vines, João M. Serra, Killian Lobato, (2021). Gas Immersion Laser Doping of silicon wafers: Large area n++ phosphorus doping on p++ emitters by laser spot rastering. 2021 Spring Meeting of the European Materials Research Society (E-MRS), -

IEEE
Guilherme Gaspar, Afonso F. Guerra, Filipe C. Serra, Ana S. Viana, Arumaghan Jayaprasad, Ivo Costa, David M. Pêra, José A. Silva, Lasse Vines, João M. Serra, Killian Lobato, "Gas Immersion Laser Doping of silicon wafers: Large area n++ phosphorus doping on p++ emitters by laser spot rastering" in 2021 Spring Meeting of the European Materials Research Society (E-MRS), , 2021, pp. -, doi:

BIBTEX
@InProceedings{54456, author = {Guilherme Gaspar and Afonso F. Guerra and Filipe C. Serra and Ana S. Viana and Arumaghan Jayaprasad and Ivo Costa and David M. Pêra and José A. Silva and Lasse Vines and João M. Serra and Killian Lobato}, title = {Gas Immersion Laser Doping of silicon wafers: Large area n++ phosphorus doping on p++ emitters by laser spot rastering}, booktitle = {2021 Spring Meeting of the European Materials Research Society (E-MRS)}, year = 2021, pages = {-}, address = {}, publisher = {} }