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Guilherme Gaspar, Afonso F. Guerra, Filipe C. Serra, Ana S. Viana, Arumaghan Jayaprasad, Ivo Costa, David M. Pêra, José A. Silva, Lasse Vines, João M. Serra, Killian Lobato, (2021). Gas Immersion Laser Doping of silicon wafers: Large area n++ phosphorus doping on p++ emitters by laser spot rastering. 2021 Spring Meeting of the European Materials Research Society (E-MRS), -
IEEE
Guilherme Gaspar, Afonso F. Guerra, Filipe C. Serra, Ana S. Viana, Arumaghan Jayaprasad, Ivo Costa, David M. Pêra, José A. Silva, Lasse Vines, João M. Serra, Killian Lobato, "Gas Immersion Laser Doping of silicon wafers: Large area n++ phosphorus doping on p++ emitters by laser spot rastering" in 2021 Spring Meeting of the European Materials Research Society (E-MRS), , 2021, pp. -,
doi:
BIBTEX
@InProceedings{54456,
author = {Guilherme Gaspar and Afonso F. Guerra and Filipe C. Serra and Ana S. Viana and Arumaghan Jayaprasad and Ivo Costa and David M. Pêra and José A. Silva and Lasse Vines and João M. Serra and Killian Lobato},
title = {Gas Immersion Laser Doping of silicon wafers: Large area n++ phosphorus doping on p++ emitters by laser spot rastering},
booktitle = {2021 Spring Meeting of the European Materials Research Society (E-MRS)},
year = 2021,
pages = {-},
address = {},
publisher = {}
}