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Publication details

Document type
Journal articles

Document subtype
Full paper

Title
Pulsed injection metal organic chemical vapour deposition and characterisation of thin CaO films

Participants in the publication
R.P. Borges (Author)
P. Ferreira (Author)
A. Saraiva (Author)
R. Gonçalves (Author)
M.A. Rosa (Author)
A.P. Gonçalves (Author)
R.C. da Silva (Author)
S. Magalhães (Author)
M.J.V. Lourenço (Author)
Dep. Química e Bioquímica
 CQE
 F.J.V. Santos (Author)
Dep. Química e Bioquímica
 M. Godinho (Author)
Dep. Física
 CFMC
Summary
Thin films of CaO were grown on silicon (Si) and lanthanum aluminate (LaAlO3) substrates by pulsed injection metal-organic chemical vapour deposition in a vertical injection MOCVD system. Growth parameters were systematically varied to study their effect on film growth and quality and to determine the optimal growth conditions for this material. Film quality and growth rate were evaluated by atomic force microscopy, X-ray diffraction and Rutherford Backscattering Spectroscopy measurements. Optimised conditions allowed growing transparent, single phase films textured along the (0 0 l) direction.

Date of Publication
2009-05

Institution
FACULDADE DE CIÊNCIAS DA UNIVERSIDADE DE LISBOA

Where published
Physica B: Condensed Matter

Publication Identifiers
ISSN - 0921-4526

Publisher
Elsevier BV

Volume
404
Number
8-11

Number of pages
5
Starting page
1398
Last page
1403

Document Identifiers
DOI - https://doi.org/10.1016/j.physb.2008.12.031
URL - http://dx.doi.org/10.1016/j.physb.2008.12.031

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APA
R.P. Borges, P. Ferreira, A. Saraiva, R. Gonçalves, M.A. Rosa, A.P. Gonçalves, R.C. da Silva, S. Magalhães, M.J.V. Lourenço, F.J.V. Santos, M. Godinho, (2009). Pulsed injection metal organic chemical vapour deposition and characterisation of thin CaO films. Physica B: Condensed Matter, 404, 1398-1403. ISSN 0921-4526. eISSN . http://dx.doi.org/10.1016/j.physb.2008.12.031

IEEE
R.P. Borges, P. Ferreira, A. Saraiva, R. Gonçalves, M.A. Rosa, A.P. Gonçalves, R.C. da Silva, S. Magalhães, M.J.V. Lourenço, F.J.V. Santos, M. Godinho, "Pulsed injection metal organic chemical vapour deposition and characterisation of thin CaO films" in Physica B: Condensed Matter, vol. 404, pp. 1398-1403, 2009. 10.1016/j.physb.2008.12.031

BIBTEX
@article{35965, author = {R.P. Borges and P. Ferreira and A. Saraiva and R. Gonçalves and M.A. Rosa and A.P. Gonçalves and R.C. da Silva and S. Magalhães and M.J.V. Lourenço and F.J.V. Santos and M. Godinho}, title = {Pulsed injection metal organic chemical vapour deposition and characterisation of thin CaO films}, journal = {Physica B: Condensed Matter}, year = 2009, pages = {1398-1403}, volume = 404 }