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Publication details

Document type
Journal articles

Document subtype
Full paper

Title
Role of the rf Frequency on the Structure and Composition of Polymorphous Silicon films

Participants in the publication
H. Águas (Author)
L. Raniero (Author)
L. Pereira (Author)
A. S. Viana (Author)
Dep. Química e Bioquímica
 E. Fortunato (Author)
R. Martins. (Author)

Date of Publication
2004

Where published
MATERIALS SCIENCE FORUM

Publication Identifiers
ISSN - 0255-5476

Volume
338-340

Starting page
183
Last page
187

Document Identifiers
DOI - https://doi.org/10.1016/j.jnoncrysol.2004.02.049


Export

APA
H. Águas, L. Raniero, L. Pereira, A. S. Viana, E. Fortunato, R. Martins., (2004). Role of the rf Frequency on the Structure and Composition of Polymorphous Silicon films . MATERIALS SCIENCE FORUM, 338-340, 183-187. ISSN 0255-5476. eISSN .

IEEE
H. Águas, L. Raniero, L. Pereira, A. S. Viana, E. Fortunato, R. Martins., "Role of the rf Frequency on the Structure and Composition of Polymorphous Silicon films " in MATERIALS SCIENCE FORUM, vol. 338-340, pp. 183-187, 2004. 10.1016/j.jnoncrysol.2004.02.049

BIBTEX
@article{24363, author = {H. Águas and L. Raniero and L. Pereira and A. S. Viana and E. Fortunato and R. Martins.}, title = {Role of the rf Frequency on the Structure and Composition of Polymorphous Silicon films }, journal = {MATERIALS SCIENCE FORUM}, year = 2004, pages = { 183-187}, volume = 338-340 }