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Publication details

Document type
Journal articles

Document subtype
Full paper

Title
Maskless Interferometric Lithography based on Digital Micromirror Devices

Participants in the publication
A. P. Cabral (Author)
LOLS
J. M. Rebordão (Author)
LOLS

Date of Publication
2003

Where published
OPTICAL ENGINEERING

Publication Identifiers
ISSN - 0091-3286


Export

APA
A. P. Cabral, J. M. Rebordão, (2003). Maskless Interferometric Lithography based on Digital Micromirror Devices. OPTICAL ENGINEERING, ISSN 0091-3286. eISSN .

IEEE
A. P. Cabral, J. M. Rebordão, "Maskless Interferometric Lithography based on Digital Micromirror Devices" in OPTICAL ENGINEERING, 2003.

BIBTEX
@article{21, author = {A. P. Cabral and J. M. Rebordão}, title = {Maskless Interferometric Lithography based on Digital Micromirror Devices}, journal = {OPTICAL ENGINEERING}, year = 2003, }