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Publication details

Document type
Conference papers

Document subtype
Extended abstract/Short paper

Title
Gas immersion laser doping: n++ phosphorus doping on p+ Cz-Si wafers with a highly doped p++ emitter

Participants in the publication
Filipe Serra (Author)
Guilherme Gaspar (Author)
Ana Viana (Author)
Dep. Química e Bioquímica
CQE
Jayaprasad Arumughan (Author)
Ivo Costa (Author)
David Pêra (Author)
José Silva (Author)
Lasse Vines (Author)
João Serra (Author)
Killian Lobato (Author)

Date of Publication
2023

Event
AIP Conference Proceedings,INTERNATIONAL CONFERENCE ON SUSTAINABLE MATERIALS SCIENCE, STRUCTURES, AND MANUFACTURING

Publication Identifiers

Address
Chittoor, India

Publisher
AIP Publishing

Volume
2869

Starting page
100003

Document Identifiers
DOI - https://doi.org/10.1063/5.0140455
URL - http://dx.doi.org/10.1063/5.0140455


Export

APA
Filipe Serra, Guilherme Gaspar, Ana Viana, Jayaprasad Arumughan, Ivo Costa, David Pêra, José Silva, Lasse Vines, João Serra, Killian Lobato, (2023). Gas immersion laser doping: n++ phosphorus doping on p+ Cz-Si wafers with a highly doped p++ emitter. AIP Conference Proceedings,INTERNATIONAL CONFERENCE ON SUSTAINABLE MATERIALS SCIENCE, STRUCTURES, AND MANUFACTURING, 100003-

IEEE
Filipe Serra, Guilherme Gaspar, Ana Viana, Jayaprasad Arumughan, Ivo Costa, David Pêra, José Silva, Lasse Vines, João Serra, Killian Lobato, "Gas immersion laser doping: n++ phosphorus doping on p+ Cz-Si wafers with a highly doped p++ emitter" in AIP Conference Proceedings,INTERNATIONAL CONFERENCE ON SUSTAINABLE MATERIALS SCIENCE, STRUCTURES, AND MANUFACTURING, Chittoor, India, 2023, pp. 100003-, doi: 10.1063/5.0140455

BIBTEX
@InProceedings{62399, author = {Filipe Serra and Guilherme Gaspar and Ana Viana and Jayaprasad Arumughan and Ivo Costa and David Pêra and José Silva and Lasse Vines and João Serra and Killian Lobato}, title = {Gas immersion laser doping: n++ phosphorus doping on p+ Cz-Si wafers with a highly doped p++ emitter}, booktitle = {AIP Conference Proceedings,INTERNATIONAL CONFERENCE ON SUSTAINABLE MATERIALS SCIENCE, STRUCTURES, AND MANUFACTURING}, year = 2023, pages = {100003-}, address = {Chittoor, India}, publisher = {AIP Publishing} }