Exportar referência
APA
I. Ferreira, E. Fortunato, P. Vilarinho, A.S. Viana, A.R. Ramos, E. Alves, R. Martins, (2006). Hydrogenated silicon carbon nitride films obtained by HWCVD, PA-HWCVD and PECVD techniques. Journal of Non-Crystalline Solids, 352, 1361-1366. http://dx.doi.org/10.1016/j.jnoncrysol.2006.02.025
IEEE
I. Ferreira, E. Fortunato, P. Vilarinho, A.S. Viana, A.R. Ramos, E. Alves, R. Martins, "Hydrogenated silicon carbon nitride films obtained by HWCVD, PA-HWCVD and PECVD techniques" in Journal of Non-Crystalline Solids, vol. 352, pp. 1361-1366, 2006.
10.1016/j.jnoncrysol.2006.02.025
BIBTEX
@article{50828,
author = {I. Ferreira and E. Fortunato and P. Vilarinho and A.S. Viana and A.R. Ramos and E. Alves and R. Martins},
title = {Hydrogenated silicon carbon nitride films obtained by HWCVD, PA-HWCVD and PECVD techniques},
journal = {Journal of Non-Crystalline Solids},
year = 2006,
pages = {1361-1366},
volume = 352
}