BIBLIOS

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Publication details

Document type
Patents


Title
Maskless Optical Interferometric Lithography

Participants in the publication
Alexandre P. Cabral (Author)
INSTITUTO NACIONAL DE ENGENHARIA, TECNOLOGIA E INOVAÇÃO
José Manuel Rebordão (Author)
INSTITUTO NACIONAL DE ENGENHARIA, TECNOLOGIA E INOVAÇÃO

Summary
PCT/PT03/00004; WO2004/088363 (14/10/2004)

Date of Submisson/Request
2013
Data de Concessão
2004

Institution
FACULDADE DE CIÊNCIAS DA UNIVERSIDADE DE LISBOA

Publication Identifiers


Export

APA
Alexandre P. Cabral, José Manuel Rebordão, (2004). Maskless Optical Interferometric Lithography

IEEE
Alexandre P. Cabral, José Manuel Rebordão, "Maskless Optical Interferometric Lithography", 2004

BIBTEX
@misc{408, author = {Alexandre P. Cabral and José Manuel Rebordão}, title = {Maskless Optical Interferometric Lithography}, year = 2004 }