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Publication details

Document type
Conference papers

Document subtype
Poster without full or short paper

Title
Optical metrology for nanotechnology

Participants in the publication
J. Coelho (Author)
LOLS
J. M. Rebordão (Author)
LOLS

Date of Publication
2008

Event
2nd Workshop on Low-Dimentional Structures: properties and Applications

Publication Identifiers

Address
Aveiro


Export

APA
J. Coelho, J. M. Rebordão, (2008). Optical metrology for nanotechnology. 2nd Workshop on Low-Dimentional Structures: properties and Applications, -

IEEE
J. Coelho, J. M. Rebordão, "Optical metrology for nanotechnology" in 2nd Workshop on Low-Dimentional Structures: properties and Applications, Aveiro, 2008, pp. -, doi:

BIBTEX
@InProceedings{364, author = {J. Coelho and J. M. Rebordão}, title = {Optical metrology for nanotechnology}, booktitle = {2nd Workshop on Low-Dimentional Structures: properties and Applications}, year = 2008, pages = {-}, address = {Aveiro}, publisher = {} }