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APA
J. Coelho, J. M. Rebordão, (2008). Optical metrology for micro- and nanotechnology. Micro- and Nanotechnologies for Industrial Applications Seminar (IPMMAN project), -
IEEE
J. Coelho, J. M. Rebordão, "Optical metrology for micro- and nanotechnology" in Micro- and Nanotechnologies for Industrial Applications Seminar (IPMMAN project), ISQ, 2008, pp. -,
doi:
BIBTEX
@InProceedings{363,
author = {J. Coelho and J. M. Rebordão},
title = {Optical metrology for micro- and nanotechnology},
booktitle = {Micro- and Nanotechnologies for Industrial Applications Seminar (IPMMAN project)},
year = 2008,
pages = {-},
address = {ISQ},
publisher = {}
}