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Publication details

Document type
Conference papers

Document subtype
Full paper

Title
Silicon film deposition on crystalline, sintered and powder substrates using an inline optical processing CVD system

Participants in the publication
Augusto A (Author)
Serra F (Author)
Vallêra A (Author)
Serra JM (Author)
Dep. Engenharia Geográfica, Geofísica e Energia
 IDL
Date of Publication
2014

Event
Physica Status Solidi C

Publication Identifiers

Document Identifiers
DOI - https://doi.org/10.1002/pssc.201400126


Export

APA
Augusto A, Serra F, Vallêra A, Serra JM, (2014). Silicon film deposition on crystalline, sintered and powder substrates using an inline optical processing CVD system. Physica Status Solidi C, -

IEEE
Augusto A, Serra F, Vallêra A, Serra JM, "Silicon film deposition on crystalline, sintered and powder substrates using an inline optical processing CVD system" in Physica Status Solidi C, , 2014, pp. -, doi: 10.1002/pssc.201400126

BIBTEX
@InProceedings{34720, author = {Augusto A and Serra F and Vallêra A and Serra JM}, title = {Silicon film deposition on crystalline, sintered and powder substrates using an inline optical processing CVD system}, booktitle = {Physica Status Solidi C}, year = 2014, pages = {-}, address = {}, publisher = {} }