Exportar referência
APA
J. M. Serra, A.M. Vallera, (1996). Oxygen redistribution during diffusion in thin silicon layers. MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS, 36, 175-178. ISSN 0921-5107. eISSN .
IEEE
J. M. Serra, A.M. Vallera, "Oxygen redistribution during diffusion in thin silicon layers" in MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS, vol. 36, pp. 175-178, 1996.
10.1016/0921-5107(95)01305-9
BIBTEX
@article{34512,
author = {J. M. Serra and A.M. Vallera},
title = {Oxygen redistribution during diffusion in thin silicon layers},
journal = {MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS},
year = 1996,
pages = {175-178},
volume = 36
}