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Publication details

Document type
Journal articles

Document subtype
Full paper

Title
Patterned surfaces in p-type silicon by photodefined etching

Participants in the publication
M. Martins (Author)
R.M.Gamboa (Author)
J.M.Alves (Author)
Dep. Engenharia Geográfica, Geofísica e Energia
 IDL
 J. M. Serra (Author)
Dep. Engenharia Geográfica, Geofísica e Energia
 IDL
 A. M. Vallera (Author)
Dep. Engenharia Geográfica, Geofísica e Energia
 SESUL
Date of Publication
1999

Where published
APPLIED SURFACE SCIENCE

Publication Identifiers
ISSN - 0169-4332

Publisher
Elsevier Science

Volume
138

Starting page
330
Last page
334

Document Identifiers
DOI - https://doi.org/10.1016/s0169-4332(98)00574-1

Rankings
Web Of Science Q3 (1999) - 1.195 - Chemistry, Physical
Web Of Science Q2 (1999) - 1.195 - Materials Science, Coatings & Films
Web Of Science Q2 (1999) - 1.195 - Physics, Applied
Web Of Science Q2 (1999) - 1.195 - Physics, Condensed Matter
SCIMAGO Q1 (1999) - 1.017 - Surfaces, Coatings and Films

Keywords
Silicon photoetching


Export

APA
M. Martins, R.M.Gamboa, J.M.Alves, J. M. Serra, A. M. Vallera, (1999). Patterned surfaces in p-type silicon by photodefined etching. APPLIED SURFACE SCIENCE, 138, 330-334. ISSN 0169-4332. eISSN .

IEEE
M. Martins, R.M.Gamboa, J.M.Alves, J. M. Serra, A. M. Vallera, "Patterned surfaces in p-type silicon by photodefined etching" in APPLIED SURFACE SCIENCE, vol. 138, pp. 330-334, 1999. 10.1016/s0169-4332(98)00574-1

BIBTEX
@article{34506, author = {M. Martins and R.M.Gamboa and J.M.Alves and J. M. Serra and A. M. Vallera}, title = {Patterned surfaces in p-type silicon by photodefined etching}, journal = {APPLIED SURFACE SCIENCE}, year = 1999, pages = {330-334}, volume = 138 }